DocumentCode
2798413
Title
Vacuum microfabrication on live fruit fly
Author
Shum, Angela J. ; Parviz, Babak A.
Author_Institution
Univ. of Washington, Seattle
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
179
Lastpage
182
Abstract
The survival rate of Drosophila when exposed to moderate vacuum levels is studied and it is established that the organism can be subjected to 55 mTorr vacuum for periods as long as 70 minutes with a significant rate of survival (>20%). This finding opens a number of new opportunities for performing fabrication processes, similar to the ones performed on a silicon wafer, on a fruit fly as a live substrate. As a model microfabrication process, it is shown how a collection of Drosophila can be made to self-assemble into an array of microfabricated recesses on a silicon wafer and how a shadow mask can be used to thermally evaporate 100 nm of indium on flies. The procedure resulted in the production of a number of live flies with 50 mum indium micro patterns on their wings. The first demonstration of vacuum microfabrication on a live organism provides the first step towards the development of a hybrid biological/solid-state manufacturing process for complex microsystems.
Keywords
biotechnology; indium; masks; micromachining; self-assembly; vacuum deposition; zoology; Drosophila; complex microsystems; fruit fly; hybrid biological-solid-state manufacturing process; indium micro patterns; pressure 55 mtorr; self-assembly; shadow mask; silicon wafer; thermal evaporation; vacuum microfabrication; Embryo; Energy measurement; Fabrication; Indium; Insects; Manufacturing processes; Organisms; Production; Silicon; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433046
Filename
4433046
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