The layer-built sensor/actuator integrated array for the 2D feedback conveyance

We stack-integrated a transparent actuator array chip on a photo sensor array chip and demonstrated 2D conveyance of an object on the array with closed loop feedback. The actuator array has 16times16 cells; each cell has four thermo-bimorph actuators. Matched array of photo-diodes detected the shadow of the object; this information is processed by FPGA that controls the actuator array to energize. We have demonstrated an automatic feedback conveyance to the target point by energizing the actuators just under the object.