Optical and sensory properties of ZnO nanofibrous layers grown by magnetron sputtering

Author

Ghimpu, Lidia ; Tiginyanu, I.M. ; Ursaki, Veaceslav ; Lupan, Oleg ; Chow, L. ; Rudzevich, Yauheni ; Lin, Yashen

Author_Institution

Lab. of Nanotechnol., Inst. of Electron. Eng. & Nanotechnol., Chisinau, Moldova

Volume

1

fYear

2012

fDate

15-17 Oct. 2012

Firstpage

139

Lastpage

142

Abstract

This paper presents optical and sensory properties of ZnO nanofirous layers grown by a cost-effective and fast fabrication method based on magnetron sputtering. The as-prepared nanofibrous layers show good conductive properties which are of interest for gas sensing structures. Their application for hydrogen detection is demonstrated in premiere, and the developed H₂ sensor structure exhibits good response / recovery behavior under ultraviolet (UV) light, and good sensitivity. This method is cost-effective and facile and has a great potential for various sensorial applications.

Keywords

II-VI semiconductors; electrical conductivity; gas sensors; hydrogen; nanofabrication; nanofibres; nanosensors; photoluminescence; semiconductor growth; sputter deposition; wide band gap semiconductors; zinc compounds; H₂; ZnO; conductive properties; gas sensing structures; hydrogen detection; magnetron sputtering; nanofibrous layers; optical properties; recovery behavior; sensory properties; ultraviolet light; Hydrogen; Magnetic resonance imaging; Sensors; Sputtering; Temperature measurement; Zinc oxide; UV; XRD; ZnO nanofibrous; magnetron sputtering; photoluminescence; sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2012 International

Conference_Location

Sinaia

ISSN

1545-857X

Print_ISBN

978-1-4673-0737-6

Type

conf

DOI

10.1109/SMICND.2012.6400674

Filename

6400674