DocumentCode :
2798927
Title :
Nanoelectromechanical systems for biology: Where to go from now?
Author :
Nicu, L. ; Leichle, T.
Author_Institution :
LAAS, Toulouse, France
Volume :
1
fYear :
2012
fDate :
15-17 Oct. 2012
Firstpage :
51
Lastpage :
56
Abstract :
Despite the fact that bio-nano-electromechanical systems (bioNEMS) are considered as the ultimate mechanical systems for complex biosensing, one still has to demonstrate that highly sensitive nanomechanical elements can be readily mass-produced in terms of both fabrication and biofunctionalization technologies. In this paper, we discuss a fundamental change of technological paradigm based on nanoprinting-techniques which implementation will successfully address all the bioNEMS-related issues at once. The choice of the nanoprinting-based techniques as a generic way to both fabricating (by transfer-printing) and functionalizing (by nano-contact printing) ultra-dense arrays of NEMS (thousands per cm2) could lead to easy-to implement, flexible recipes for front-end and back-end processing while avoiding a long series of technological steps which most of the times dramatically impacts the yield, and subsequently the cost of fabrication.
Keywords :
biosensors; nanobiotechnology; nanocontacts; nanofabrication; nanosensors; back-end processing; bioNEMS; biofunctionalization technology; biology; bionanoelectromechanical systems; biosensing; front-end processing; highly sensitive nanomechanical elements; nanocontact printing; nanoprinting technique; technological paradigm; transfer printing; ultimate mechanical systems; ultradense arrays; Biosensors; Nanobioscience; Nanoelectromechanical systems; Nanoscale devices; Nanostructures; Probes; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference (CAS), 2012 International
Conference_Location :
Sinaia
ISSN :
1545-857X
Print_ISBN :
978-1-4673-0737-6
Type :
conf
DOI :
10.1109/SMICND.2012.6400697
Filename :
6400697
Link To Document :
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