• DocumentCode
    2798953
  • Title

    Full wafer processing and testing the future of large scale laser fabrication

  • Author

    Vettiger, P. ; Benedict, M.E. ; Bona, G.L. ; Buchmann, P. ; Cahoon, N. ; Daetwyler, K. ; Dietrich, H.P. ; Moser, A. ; Seitz, H.K. ; Voegeli, O. ; Webb, D.J. ; Wolf, P.

  • Author_Institution
    IBM Research Laboratory Zurich
  • fYear
    1990
  • fDate
    9-14 Sept. 1990
  • Firstpage
    144
  • Lastpage
    145
  • Keywords
    Chemical lasers; Etching; Large-scale systems; Laser feedback; Laser modes; Mirrors; Optical device fabrication; Semiconductor device testing; Semiconductor diodes; Semiconductor lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Laser Conference, 1990. Conference Digest. 12th IEEE International
  • Conference_Location
    Davos, Switzerland
  • Type

    conf

  • DOI
    10.1109/ISLC.1990.764464
  • Filename
    764464
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2798953