Title :
Optically activated microresonator sensors
Author :
Walsh, D. ; Uttamchandani, D. ; Culshaw, B.
Author_Institution :
Strathclyde Univ., Glasgow, UK
Abstract :
The similar micron dimensional sizes of anisotropically etched silicon microresonators and optical fibers offer the possibility of a compact, remotely addressed and transmission line neutral sensing scheme. The authors report the operation of a silicon resonant pressure sensor which is both excited and interrogated using an all fibre optic system. The resonant frequency was observed to change linearly from 48.2 kHz to 83 kHz as the gauge pressure was varied from -0.8 bar to +0.8 bar. In addition, the response of both bare and metal coated silicon microresonators are analysed in air and also under vacuum
Keywords :
electric sensing devices; elemental semiconductors; fibre optic sensors; pressure measurement; pressure transducers; silicon; 0.8 to 0.8 bar; 48.2 to 83 kHz; Si; anisotropically etched microresonator; fibre optic system; optically activated microresonator sensors; resonant pressure sensor;
Conference_Titel :
Microsensors, IEE Colloquium on
Conference_Location :
London
