DocumentCode
279911
Title
Micromachined resonant sensors
Author
Greenwood, John C.
Author_Institution
Druck Ltd., Groby, UK
fYear
1990
fDate
32967
Firstpage
42491
Lastpage
42492
Abstract
Micromechanical fabrication techniques are particularly suitable for making resonant sensors; the author explains why these techniques are useful for micromachining three-dimensional structures with reduced size and cost. Si is used for illustration although other materials such as quartz are of interest
Keywords
crystal resonators; electric sensing devices; elemental semiconductors; semiconductor technology; silicon; Si; micromachining; micromechanics; quartz; resonant structures; semiconductor technology; three-dimensional structures;
fLanguage
English
Publisher
iet
Conference_Titel
Microsensors, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
189989
Link To Document