Title :
Micromachined resonant sensors
Author :
Greenwood, John C.
Author_Institution :
Druck Ltd., Groby, UK
Abstract :
Micromechanical fabrication techniques are particularly suitable for making resonant sensors; the author explains why these techniques are useful for micromachining three-dimensional structures with reduced size and cost. Si is used for illustration although other materials such as quartz are of interest
Keywords :
crystal resonators; electric sensing devices; elemental semiconductors; semiconductor technology; silicon; Si; micromachining; micromechanics; quartz; resonant structures; semiconductor technology; three-dimensional structures;
Conference_Titel :
Microsensors, IEE Colloquium on
Conference_Location :
London
