Design, modeling, and fabrication of an integrated micromechanical switch for potential applications in adaptive fractal antenna arrays

This paper presents the modeling and analysis of a MEMS switch for microwave applications. Parylene polymer (poly-para-xylylene) is studied as a substitution for silicon or metal-based materials in existing capacitive shunt RF switches to enhance the device performance. Through modeling and analysis, we have shown that polymer-based RF switches can be driven by lower actuation voltage with larger off/on capacitance ratio. Fabrication of the switch and integration of the switch with wireless antenna system is underway. Successful development of the switch will potentially enhance the performance of adaptive fractal antennas for microwave applications.