MEMS scanning mirror supported by soft polymeric springs and actuated by electrostatic charge separation

We present a novel MEMS scanning mirror featuring soft polymeric suspensions of the mirror plate. The combination of the polymeric suspension and a stiff silicon mirror plate enables large scan angles with a negligible distortion of the mirror plate itself at frequencies up to 1 kHz. Thus, the scan angle per applied actuation voltage is high compared to single material solutions by H. Miyajima et al. (2004). Furthermore, the mirror is actuated by electrostatic charge separation. Therefore, no electrical connection of the mirror is required.