Finite element analysis on electrode structure of QCM

Because quartz crystal is complex at high frequency vibration, the only vibration mode of QCM will be destroyed at some designs of electrode structures and couplings with other vibration modes will happen sometimes. This paper makes a 3D model for QCM and analyzes directly the coupled phenomenon of the structural and electric fields of QCM with finite element method. Through analyzing the convergence of the resonant frequency of QCM, the correctness of finite element analysis is proved. Then the influence of different sizes of electrode on vibration of QCM and an optimal size of electrode is discovered. And design of mesa on crystal plate is provided to solve the question that energy trapping is not good enough. This design proves valid based on finite element calculation and the optimal height of mesa is given.