Title :
Finite element analysis on electrode structure of QCM
Author_Institution :
Inst. of Autom., Nanjing Univ. of Sci. & Technol., Nanjing, China
Abstract :
Because quartz crystal is complex at high frequency vibration, the only vibration mode of QCM will be destroyed at some designs of electrode structures and couplings with other vibration modes will happen sometimes. This paper makes a 3D model for QCM and analyzes directly the coupled phenomenon of the structural and electric fields of QCM with finite element method. Through analyzing the convergence of the resonant frequency of QCM, the correctness of finite element analysis is proved. Then the influence of different sizes of electrode on vibration of QCM and an optimal size of electrode is discovered. And design of mesa on crystal plate is provided to solve the question that energy trapping is not good enough. This design proves valid based on finite element calculation and the optimal height of mesa is given.
Keywords :
crystal resonators; electrodes; finite element analysis; microbalances; microsensors; vibrations; 3D model; QCM; crystal plate; electrode structure; energy trapping; finite element analysis; high frequency vibration; mesa design; quartz crystal microbalance sensor; resonant frequency; Coupled mode analysis; Design automation; Electrodes; Finite element methods; Hydrogen; Q measurement; Resonance; Resonant frequency; Semiconductor device modeling; Vibration measurement; QCM; coupling; energy trapping; finite element;
Conference_Titel :
Control and Decision Conference, 2009. CCDC '09. Chinese
Conference_Location :
Guilin
Print_ISBN :
978-1-4244-2722-2
Electronic_ISBN :
978-1-4244-2723-9
DOI :
10.1109/CCDC.2009.5192819
