Magnetically actuated scanning microlens for NIR Raman spectroscopy

Author

Siu, Chin-Pang-Billy ; Zeng, Haishan ; Chiao, Mu

Author_Institution

Univ. of British Columbia, Vancouver

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

735

Lastpage

738

Abstract

This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal near infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20 mum thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. This work demonstrates a microlens with a scanning angle of plusmn24deg driven by an external AC magnetic field orientated at an angle of 30deg from the horizontal rotation axis. A coplanar 152 mum scanning range is demonstrated by a 22.2times10^-3 Tesla external magnetic field at 197 Hz.

Keywords

Raman spectroscopy; bioMEMS; microlenses; PDMS plano-convex lens; external AC magnetic field; ferromagnetic nickel platform integrated; frequency 197 Hz; magnetically actuated scanning microlens; miniature confocal near infrared Raman spectroscopy; noninvasive skin cancer diagnosis; size 1.25 mm; size 152 mum; size 2.0 mm; size 20 mum; Fabrication; Lenses; Magnetic fields; Microoptics; Nickel; Raman scattering; Silicon; Skin cancer; Spectroscopy; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433127

Filename

4433127