Non-isothermal micromechanical resonators

Author

Chandorka, S.A. ; Mehta, H. ; Agarwal, M. ; Hopcroft, M.A. ; Jha, C.M. ; Candler, R.N. ; Yama, G. ; Bahl, G. ; Kim, B. ; Melamud, R. ; Goodson, K.E. ; Kenny, T.W.

Author_Institution

Stanford Univ., Stanford

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

211

Lastpage

214

Abstract

In this work, we study the effect of non-isothermal operation on beam-type micromechanical resonators. A double ended tuning fork (DETF) resonator was studied under a linearly varying temperature profile along the length of the beam. We present models which show that for a constant center temperature of the beams, increasing the linear temperature gradient along the DETF substantially increases the quality factor (Q), with marginal effect on frequency. We also find that it is possible to use non-isothermal operation to improve quality factor in MEMS resonator based ovenized reference oscillators.

Keywords

Q-factor; micromechanical resonators; oscillators; vibrations; MEMS resonator; beam length; double ended tuning fork resonator; linear temperature gradient; nonisothermal micromechanical resonator; ovenized reference oscillator; quality factor; Heating; Isothermal processes; Micromechanical devices; Oscillators; Q factor; Resonance; Resonant frequency; Stability; Temperature; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433138

Filename

4433138