Design and fabrication of an artificial skin using PI-copper films

Author

Cheng, M.-Y. ; Chang, W.-Y. ; Tsao, L.-C. ; Yang, S.-A. ; Yang, Y.-J. ; Shih, W.-P. ; Chang, F.-Y. ; Chang, S.-H. ; Fan, K.-C.

Author_Institution

Nat. Taiwan Univ., Taipei

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

389

Lastpage

392

Abstract

This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.

Keywords

copper; humanoid robots; micromachining; microsensors; pressure sensors; skin; tactile sensors; temperature sensors; Cu; PI-copper films; artificial skin; conductive polymer; inter-digital copper electrodes; micromachining techniques; pressure sensing elements; robot; tactile sensing array; temperature sensing elements; temperature sensor chips; Copper; Fabrication; Humans; Polymers; Robot sensing systems; Sensor arrays; Silicon; Skin; Substrates; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-0950-1

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433149

Filename

4433149