Title :
Photothermal transducer based on ultrathin bimetal Si resonator
Author :
Ono, Takahito ; Yoshida, Shinya ; Kawai, Yusuke ; Esashi, Masayoshi
Author_Institution :
Tohoku Univ., Sendai
Abstract :
In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.
Keywords :
cantilevers; laser beam effects; micromechanical resonators; microsensors; photothermal effects; transducers; Si; bimetal cantilever; bimetal transducer; laser irradiation; light modulation; mechanical FM detection; nonlinear photothermal effect; photothermal transducer; size 45 nm; thermal response frequency; ultrathin bimetal silicon resonator; Chemical sensors; Frequency modulation; Gold; Mechanical sensors; Optical modulation; Pump lasers; Q factor; Spectroscopy; Thermal stresses; Transducers;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433165