Photothermal transducer based on ultrathin bimetal Si resonator

Author

Ono, Takahito ; Yoshida, Shinya ; Kawai, Yusuke ; Esashi, Masayoshi

Author_Institution

Tohoku Univ., Sendai

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

639

Lastpage

642

Abstract

In this paper, we present a photothermal transducer consisted of an ultrathin Au/Si bimetal cantilever as a resonator with a total thickness of 45 nm and quality factor of -12000. Due to the high quality factor and small size, this transducer is sensitive to photothermal effect and its thermal response frequency can be up to 140 kHz. It is demonstrated that the irradiation of weak laser can enhance the response of the transducer due to the nonlinear photothermal effect. The mechanical FM detection of modulated light is demonstrated using this bimetal transducer.

Keywords

cantilevers; laser beam effects; micromechanical resonators; microsensors; photothermal effects; transducers; Si; bimetal cantilever; bimetal transducer; laser irradiation; light modulation; mechanical FM detection; nonlinear photothermal effect; photothermal transducer; size 45 nm; thermal response frequency; ultrathin bimetal silicon resonator; Chemical sensors; Frequency modulation; Gold; Mechanical sensors; Optical modulation; Pump lasers; Q factor; Spectroscopy; Thermal stresses; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433165

Filename

4433165