Title :
Iodine irradiation induced defects in crystalline silicon
Author :
Slav, Adrian ; Lepadatu, Ana-Maria ; Palade, Catalin ; Stavarache, Ionel ; Iordache, G. ; Ciurea, Magdalena Lidia ; Lazanu, Sorina ; Mitroi, M.R.
Author_Institution :
Nat. Inst. of Mater. Phys., Magurele, Romania
Abstract :
N-type P-doped silicon single crystals with resistivity higher than 8000 Ωcm were irradiated with 127I6+ ions of 28 MeV kinetic energy. The penetration of the ions through the target and the processes of energy loss were simulated using the CTRIM Monte Carlo code, and point defect production was calculated in the frame of our diffusion-reaction model. Trapping phenomena were investigated using the method of thermally stimulated currents without applied bias. The modeling of the current-temperature curves takes into consideration both point defects and stress-type trapping centers, produced by the ions stopped into the crystal.
Keywords :
Monte Carlo methods; diffusion; electrical resistivity; elemental semiconductors; ion beam effects; phosphorus; point defects; silicon; thermally stimulated currents; CTRIM Monte Carlo code; Si:P; crystalline silicon; current-temperature curves; diffusion-reaction model; doped silicon single crystals; electron volt energy 28 MeV; energy loss; iodine irradiation induced defects; point defect; resistivity; stress-type trapping centers; thermally stimulated currents; Charge carrier processes; Crystals; Energy loss; Ions; Production; Radiation effects; Silicon; ion irradiation; silicon; stress induced traps; thermally stimulated currents without applied bias;
Conference_Titel :
Semiconductor Conference (CAS), 2012 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4673-0737-6
DOI :
10.1109/SMICND.2012.6400787