DocumentCode
2800634
Title
Self-assembled inorganic micro-display on plastic
Author
Saeedi, Ehsan ; Kim, Samuel S. ; Parviz, Babak A.
Author_Institution
Univ. of Washington, Seattle
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
755
Lastpage
758
Abstract
We present the design and a method of construction for micro-displays via integrating free-standing micro light emitting diodes (LED) onto unconventional substrates using fluidic self-assembly. The micro LEDs are fabricated on AlGaAs substrates and released into a powder-like collection of microcomponents. The display substrate is a plastic template patterned with metal interconnects and a photopatternable polymer (SU8) to have a 4times4 array of binding sites each containing areas covered by a low melting point alloy. To assemble the display, the plastic substrate is inserted in a heated acidic ethylene glycol solution and the micro LEDs are released on the surface. Self-assembly of LEDs onto the binding sites aided by shape recognition, capillary forces resultant from the molten alloy, gravity, and fluidic forces completes the display. The self-assembly method allows for integration of crystalline semiconductor devices on plastics and other substrates that are incompatible with conventional microfabrication processes.
Keywords
LED displays; microdisplays; microfluidics; plastics; fluidic self-assembly; micro light emitting diodes; microcomponents; microfabrication; photopatternable polymer; plastic; powder-like collection; self-assembled inorganic microdisplay; Anti-freeze; Assembly; Design methodology; Displays; Light emitting diodes; Plastics; Polymers; Self-assembly; Shape memory alloys; Substrates; Flexible display; process integration; self-assembly;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433172
Filename
4433172
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