• DocumentCode
    2800649
  • Title

    Highly reliable and extremely stable SiGe micro-mirrors

  • Author

    Gromova, M. ; Haspeslagh, L. ; Verbist, A. ; Du Bois, B. ; Van Hoof, R. ; Eyckens, B. ; Sijmus, B. ; De Wolf, I. ; Simons, V. ; Mutter, P. ; Lauwagie, T. ; Willegems, M. ; Locorotondo, S. ; Boullart, W. ; Baert, K. ; Witvrouw, A.

  • Author_Institution
    lMEC, Leuven
  • fYear
    2007
  • fDate
    21-25 Jan. 2007
  • Firstpage
    759
  • Lastpage
    762
  • Abstract
    This paper presents very reliable and stable micro- mirrors made of hydrogenated microcrystalline SiGe (muc-SiGe:H) at temperatures that would allow processing above standard CMOS circuitry. Very flat micro-mirrors with sizes ranging between 7.5 x 7.5 and 16 x 16 mum2 size and submicron hinges are fabricated. No hinge creep is observed over a period of 20 days and no fatigue damage is seen after 5 x 1010 cycles.
  • Keywords
    CMOS integrated circuits; micromirrors; SiGe; SiGe micromirrors; hydrogenated microcrystalline; standard CMOS circuitry; time 20 day; CMOS process; Cleaning; Electrodes; Fasteners; Germanium silicon alloys; Hydrogen; Micromechanical devices; Mirrors; Semiconductor films; Silicon germanium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
  • Conference_Location
    Hyogo
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-095-5
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2007.4433173
  • Filename
    4433173
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2800649