• DocumentCode
    2802942
  • Title

    Three-dimensional masterslice MMIC on Si substrate

  • Author

    Toyoda, I. ; Nishikawa, K. ; Tokumitsu, T. ; Kamogawa, K. ; Yamaguchi, C. ; Hirano, M. ; Aikawa, M.

  • Author_Institution
    NTT Wireless Syst. Labs., Kanagawa, Japan
  • fYear
    1997
  • fDate
    10-10 June 1997
  • Firstpage
    113
  • Lastpage
    116
  • Abstract
    This paper describes Si based three-dimensional MMIC technology. This technology greatly improves the operating frequency of Si MMICs up to the Ku-band and makes them competitive with GaAs MMICs in the higher frequency band. An X-band amplifier and highly integrated single-chip receiver using Si bipolar transistors are demonstrated to highlight the advantages of the Si 3-D MMIC technology. Cost estimation compared with conventional GaAs 2-D MMICs is also discussed.
  • Keywords
    MMIC amplifiers; bipolar MMIC; economics; elemental semiconductors; integrated circuit design; integrated circuit manufacture; microwave amplifiers; silicon; Ku-band; Si; X-band amplifier; bipolar transistors; cost estimation; operating frequency; single-chip receiver; three-dimensional masterslice MMIC; Bipolar transistors; Costs; Fabrication; Frequency; Gallium arsenide; Gold; Laboratories; MMICs; Radiofrequency integrated circuits; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Radio Frequency Integrated Circuits (RFIC) Symposium, 1997., IEEE
  • Conference_Location
    Denver, CO, USA
  • Print_ISBN
    0-7803-4063-9
  • Type

    conf

  • DOI
    10.1109/RFIC.1997.598755
  • Filename
    598755