Title :
Micromachined on-chip vacuum microtriodes with nanotube field emitters
Author_Institution :
California Univ., San Diego, La Jolla, CA, USA
Abstract :
Miniaturized power-amplifying vacuum devices in an on-chip form have been constructed by combining high performance nanomaterials with MEMS micromachining technology. Carbon nanotubes, one of the most fascinating new nano-materials, were incorporated into micromachined designs as cold cathode field emitters to create MEMS triode structured power amplifiers. Microstructure of the nanotube was characterised by SEM micrograph. MEMS device applications, design parameters, and device functions were discussed.
Keywords :
carbon nanotubes; crystal microstructure; micromachining; micromechanical devices; nanotube devices; power amplifiers; scanning electron microscopy; triodes; vacuum microelectronics; C; MEMS micromachining; MEMS triode structured power amplifiers.; SEM micrograph; carbon nanotubes; cold cathode field emitters; design parameters; microelectromechanical system; micromachined on-chip vacuum microtriode; microtriode device; miniaturized power amplifying vacuum devices; nanomaterials; nanotube field emitters; scanning electron microscopy; Anodes; Cathodes; Electron tubes; Fabrication; Micromechanical devices; Microwave amplifiers; Modems; Nanoscale devices; Vacuum technology; Voltage;
Conference_Titel :
Vacuum Electronics, 2003 4th IEEE International Conference on
Print_ISBN :
0-7803-7699-4
DOI :
10.1109/IVEC.2003.1285995
