Micromachined on-chip vacuum microtriodes with nanotube field emitters

Author

Jin, Sungho

Author_Institution

California Univ., San Diego, La Jolla, CA, USA

fYear

2003

fDate

28-30 May 2003

Firstpage

8

Lastpage

9

Abstract

Miniaturized power-amplifying vacuum devices in an on-chip form have been constructed by combining high performance nanomaterials with MEMS micromachining technology. Carbon nanotubes, one of the most fascinating new nano-materials, were incorporated into micromachined designs as cold cathode field emitters to create MEMS triode structured power amplifiers. Microstructure of the nanotube was characterised by SEM micrograph. MEMS device applications, design parameters, and device functions were discussed.

Keywords

carbon nanotubes; crystal microstructure; micromachining; micromechanical devices; nanotube devices; power amplifiers; scanning electron microscopy; triodes; vacuum microelectronics; C; MEMS micromachining; MEMS triode structured power amplifiers.; SEM micrograph; carbon nanotubes; cold cathode field emitters; design parameters; microelectromechanical system; micromachined on-chip vacuum microtriode; microtriode device; miniaturized power amplifying vacuum devices; nanomaterials; nanotube field emitters; scanning electron microscopy; Anodes; Cathodes; Electron tubes; Fabrication; Micromechanical devices; Microwave amplifiers; Modems; Nanoscale devices; Vacuum technology; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics, 2003 4th IEEE International Conference on

Print_ISBN

0-7803-7699-4

Type

conf

DOI

10.1109/IVEC.2003.1285995

Filename

1285995