The Introduction of Precision Positioning and Compensation Technology in Gantry-Type Platform

This paper presents a new method for improving the positioning precision of micro-assembly system. The spatial positioning precision is extremely requested for the micro-manufacturing applications. Therefore, develop an optimum method to improve the positioning precision and become the important issue for micro-manufacturing. In this paper, an effective method that combines the B-Spline command generator with the spatial error compensator was reported. Both were designed according to the spatial error data that was measured with a laser Doppler shift measurement. The developed method has been successfully integrated into a gantry-type micro-assembly system to ±3 μm. The preliminary results demonstrated that the proposed method is effective, and efficient for improving the positioning precision of micro-assembly system.