DocumentCode
2806611
Title
High-power single-transverse-mode operation of narrow-ridge-waveguide 0.98-μm InGaAs/AlGaAs strained-quantum-well lasers by in situ monitored RIBE
Author
Chida, Hiroaki ; Hamamoto, Kiich ; Fukagai, Kazuo ; Miyazaki, Takashi ; Ishikawa, Shin
Author_Institution
Opto-Electron. Res. Labs., NEC Corp., Ibaraki, Japan
fYear
1994
fDate
19-23 Sep 1994
Firstpage
165
Lastpage
166
Abstract
Narrow ridge waveguide 0.98-μm InGaAs/AlGaAs quantum-well laser diodes (LDs) fabricated by in situ monitored reactive ion beam etching operated in the fundamental lateral-mode up to 254 mW, and fiber-coupled power was as much as 150 mW
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; indium compounds; laser modes; optical couplers; quantum well lasers; ridge waveguides; sputter etching; waveguide lasers; 0.98 mum; 150 mW; 254 mW; InGaAs-AlGaAs; InGaAs/AlGaAs strained-quantum-well lasers; fiber-coupled power; fundamental lateral-mode; high-power single-transverse-mode operation; in situ monitored; in situ monitored RIBE; narrow-ridge-waveguide lasers; reactive ion beam etching; Etching; Indium gallium arsenide; Ion beams; Laser modes; Monitoring; Optical fiber testing; Plasma temperature; Power generation; Quantum well lasers; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Laser Conference, 1994., 14th IEEE International
Conference_Location
Maui, HI
Print_ISBN
0-7803-1754-8
Type
conf
DOI
10.1109/ISLC.1994.519317
Filename
519317
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