Electron collision cross-sections in mono-silane (SiH4) molecule: an investigation and analysis

Investigation and analysis of data for collision of electron with SiH₄ molecule has been carried out by reviewing the published data during the last two decades. Momentum transfer, vibrational-excitation, excitation, dissociation, dissociation-attachment, and ionization cross-sections are used to calculate and analyze the transport coefficients. The measured parameters reported in this work are drift velocity (W) and characteristic energy (D/μ). Calculation of transport coefficients is carried out by using the two-term numerical solution of Boltzmann equation (Bolsig).