DocumentCode
2808891
Title
Acoustic Band Gap Filters: The Next Generation of Micro-Electro-Mechanical Filters for On-Chip Silicon Radio Frequency Applications
Author
Hamel, John S. ; Norris, Ryan C.
Author_Institution
Waterloo Univ., Waterloo
fYear
2007
fDate
22-26 April 2007
Firstpage
157
Lastpage
159
Abstract
This paper reviews a new emerging technology known as acoustic band gap or phononic band gap. This phenomenon is rapidly entering the silicon world and could potentially become a new generation of MEMS filters. A simulator developed by us is discussed that can be used to study this area and to design such filters.
Keywords
acoustic filters; elemental semiconductors; micromechanical devices; radiofrequency filters; semiconductor devices; silicon; Si; acoustic band gap; acoustic band gap filters; microelectromechanical filters; on-chip silicon radiofrequency applications; phononic band gap; Acoustic applications; Acoustic devices; Acoustic waves; Filtering; Filters; Periodic structures; Photonic band gap; Radio frequency; Silicon; Surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on
Conference_Location
Vancouver, BC
ISSN
0840-7789
Print_ISBN
1-4244-1020-7
Electronic_ISBN
0840-7789
Type
conf
DOI
10.1109/CCECE.2007.46
Filename
4232705
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