Title :
Acoustic Band Gap Filters: The Next Generation of Micro-Electro-Mechanical Filters for On-Chip Silicon Radio Frequency Applications
Author :
Hamel, John S. ; Norris, Ryan C.
Author_Institution :
Waterloo Univ., Waterloo
Abstract :
This paper reviews a new emerging technology known as acoustic band gap or phononic band gap. This phenomenon is rapidly entering the silicon world and could potentially become a new generation of MEMS filters. A simulator developed by us is discussed that can be used to study this area and to design such filters.
Keywords :
acoustic filters; elemental semiconductors; micromechanical devices; radiofrequency filters; semiconductor devices; silicon; Si; acoustic band gap; acoustic band gap filters; microelectromechanical filters; on-chip silicon radiofrequency applications; phononic band gap; Acoustic applications; Acoustic devices; Acoustic waves; Filtering; Filters; Periodic structures; Photonic band gap; Radio frequency; Silicon; Surface acoustic wave devices;
Conference_Titel :
Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-1020-7
Electronic_ISBN :
0840-7789
DOI :
10.1109/CCECE.2007.46
