Title :
Sub-micron thermography of laser diodes by charging dielectric coatings with an electron beam
Author_Institution :
Zurich Res. Lab., IBM Res. Div., Ruschlikon, Switzerland
Abstract :
Electron beam charging thermography, a novel scanning electron microscope-based technique featuring submicron resolution and high speed, has been applied to investigate the thermal behavior of ridge waveguide QW laser diodes. Examples presented illustrate the complexity of thermal effects at and adjacent to laser mirrors
Keywords :
electron beam applications; infrared imaging; laser mirrors; laser stability; laser variables measurement; optical testing; quantum well lasers; ridge waveguides; scanning electron microscopy; semiconductor device testing; surface charging; waveguide lasers; dielectric coating charging; electron beam; electron beam charging thermography; high speed; laser diodes; laser mirrors; ridge waveguide quantum well lasers; scanning electron microscope-based technique; sub-micron thermography; submicron resolution; thermal behavior; thermal effects; Chemical lasers; Coatings; Dielectrics; Diode lasers; Electron beams; Gas lasers; Mirrors; Resistors; Scanning electron microscopy; Waveguide lasers;
Conference_Titel :
Semiconductor Laser Conference, 1994., 14th IEEE International
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-1754-8
DOI :
10.1109/ISLC.1994.519350
