Fabrication of optical waveguides and determination of their properties

Author

Chen, C.L. ; Daneshvar, K. ; Hinata, S.

Author_Institution

Dept. of Phys., Auburn Univ., AL, USA

fYear

1988

fDate

11-13 Apr 1988

Firstpage

674

Lastpage

678

Abstract

For the fabrication of optical waveguides, a silver film was vacuum-evaporated onto a glass substrate and then annealed at 300-400°C while applying an external electric field (0-70 V/mm) perpendicular to the substrate surface. The enhancement of the index of refraction (0-0.080) was larger for a stronger electric field. Index profiles of waveguides were determined with a scanning electron microscope (SEM) and the prism-coupling technique was used to find the number of guided modes. The eigenmode equation was numerically solved to find the relationship among the diffusion profile, index change, and number of guided mode. The index change was confirmed with Rutherford backscattering spectrometry (RBS) analyses

Keywords

optical waveguides; particle backscattering; scanning electron microscope examination of materials; Ag film; Rutherford backscattering spectrometry; annealing; diffusion profile; eigenmode equation; external electric field; fabrication; index change; index of refraction; index profiles; optical waveguides; prism-coupling technique; scanning electron microscope; Annealing; Glass; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Scanning electron microscopy; Silver; Substrates; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Southeastcon '88., IEEE Conference Proceedings

Conference_Location

Knoxville, TN

Type

conf

DOI

10.1109/SECON.1988.194943

Filename

194943