DocumentCode :
2814725
Title :
A new high-pressure system for synthesis and crystal growth of large diameter InP
Author :
Bliss, D. ; Bryant, G. ; Jafri, I. ; Prasad, V. ; Gupta, K. ; Farmer, R. ; Chandra, M.
Author_Institution :
USAF Res. Lab., Hanscom AFB, MA, USA
fYear :
1998
fDate :
11-15 May 1998
Firstpage :
38
Lastpage :
41
Abstract :
An advanced high-pressure crystal growth system for one-step synthesis and growth has been constructed from a design based on numerical simulations and experiments. Experimental work reported previously, optimizing the one-step in-situ process for synthesis and growth, served as a basis for developing the new furnace. A global model developed to simulate growth conditions in the prototype system, has contributed to our understanding of complex transport phenomena such as thermoelastic strain and dopant incorporation. Using both the experimental and the simulation results, we have designed a system to produce large diameter, high purity, low defect density compound semiconductor crystals at low cost
Keywords :
III-V semiconductors; crystal growth from melt; high-pressure techniques; indium compounds; semiconductor doping; semiconductor growth; thermoelasticity; InP; crystal growth; defect density; dopant incorporation; furnace; global model; high-pressure system; large diameter InP; one-step synthesis; semiconductor crystals; thermoelastic strain; Cleaning; Control system synthesis; Crystals; Furnaces; Indium phosphide; Magnetic heads; Numerical simulation; Resistance heating; Valves; Water heating;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location :
Tsukuba
ISSN :
1092-8669
Print_ISBN :
0-7803-4220-8
Type :
conf
DOI :
10.1109/ICIPRM.1998.712395
Filename :
712395
Link To Document :
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