Title :
Electrical and FT-IR measurements of undoped n-type InP materials grown from various stoichiometric melts
Author :
Chen, X.D. ; Sun, N.F. ; Sun, T.N. ; Liu, S.L. ; Yang, G.Y. ; Zhao, Y.W. ; Xu, X.L. ; Beling, C.D. ; Fung, S.
Author_Institution :
Hebei Semicond. Res. Inst., China
Abstract :
P-rich, In-rich and stoichiometric undoped InP melts have been synthesised by phosphorus in-situ injection method. InP crystal ingots have been grown from these melts by the liquid encapsulated Czochralski method (LEC). Samples from these ingots grown from various stoichiometric melts have been characterized by Hall effect and Fourier Transform Infrared (FT-IR) spectroscopy measurements respectively. The Hall effect measurement results indicate that the net carrier concentration of P-rich undoped InP is higher than that of In-rich and stoichiometric undoped InP materials. FT-IR spectroscopy measurements reveal that there are intensive absorption peaks which have been due to a hydrogen related indium vacancy complex VInH4. By comparing FT-IR spectra, it is found that P-rich InP material has the most intensive absorption peak of VlnH4, while In-rich InP material has the weakest absorption peak
Keywords :
Fourier transform spectra; Hall effect; III-V semiconductors; carrier density; crystal growth from melt; indium compounds; infrared spectra; semiconductor growth; vacancies (crystal); FTIR spectra; Hall effect; InP; absorption peaks; carrier concentration; crystal ingots; in-situ injection; liquid encapsulated Czochralski growth; stoichiometric undoped InP melts; vacancy complex; Absorption; Crystalline materials; Electric variables measurement; Hall effect; Hydrogen; Indium phosphide; Infrared spectra; Pollution measurement; Semiconductor materials; Spectroscopy;
Conference_Titel :
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location :
Tsukuba
Print_ISBN :
0-7803-4220-8
DOI :
10.1109/ICIPRM.1998.712396