Title :
3-axes MEMS Hall-effect sensor
Author :
Cai, Wei ; Chan, Jeremy ; Garmire, David
Author_Institution :
Dept. of Electr. Eng., Univ. of Hawaii at Manoa, Honolulu, HI, USA
Abstract :
A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
Keywords :
Hall effect transducers; microsensors; 3-axe MEMS Hall-effect sensor; coventorware; laboratory Gauss meter; polymump process; Bonding; Fasteners; Hall effect; Magnetic field measurement; Magnetic flux; Micromechanical devices; Wire; Hall effect; MEMS; PolyMUMPs;
Conference_Titel :
Sensors Applications Symposium (SAS), 2011 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
978-1-4244-8063-0
DOI :
10.1109/SAS.2011.5739801
