• DocumentCode
    2814982
  • Title

    3-axes MEMS Hall-effect sensor

  • Author

    Cai, Wei ; Chan, Jeremy ; Garmire, David

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Hawaii at Manoa, Honolulu, HI, USA
  • fYear
    2011
  • fDate
    22-24 Feb. 2011
  • Firstpage
    141
  • Lastpage
    144
  • Abstract
    A 3-axes Hall-effect sensor was fabricated using the PolyMUMPs process based on the MEMS design software, Coventorware. We document the fabrication of this MEMS device and report its preliminary performance based on comparisons to a laboratory Gauss meter.
  • Keywords
    Hall effect transducers; microsensors; 3-axe MEMS Hall-effect sensor; coventorware; laboratory Gauss meter; polymump process; Bonding; Fasteners; Hall effect; Magnetic field measurement; Magnetic flux; Micromechanical devices; Wire; Hall effect; MEMS; PolyMUMPs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors Applications Symposium (SAS), 2011 IEEE
  • Conference_Location
    San Antonio, TX
  • Print_ISBN
    978-1-4244-8063-0
  • Type

    conf

  • DOI
    10.1109/SAS.2011.5739801
  • Filename
    5739801
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2814982