Title :
High power EUV light source architecture based on 100 kHz CO2 laser driven Xe microdroplet plasma for 115W output at intermediate focus
Author :
Ariga, Tatsuya ; Endo, Akira
Keywords :
Light sources; Mirrors; Plasma sources; Plasma waves; Power generation; Power lasers; Pump lasers; Solid lasers; Ultraviolet sources; Xenon;
Conference_Titel :
Quantum Electronics Conference, 2005. International
Print_ISBN :
0-7803-9240-X
DOI :
10.1109/IQEC.2005.1561038
