DocumentCode
2815198
Title
Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target
Author
Tanaka, Hiroki ; Matsumoto, Atsushi ; Akinaga, Kouzi ; Takahashi, Akihiko ; Okada, Tatsuo
fYear
2005
fDate
38544
Firstpage
1151
Lastpage
1152
Keywords
Gratings; Laser beam cutting; Plasma measurements; Plasma properties; Power lasers; Pump lasers; Solid lasers; Tin; Ultraviolet sources; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference, 2005. International
Print_ISBN
0-7803-9240-X
Type
conf
DOI
10.1109/IQEC.2005.1561042
Filename
1561042
Link To Document