DocumentCode

2815281

Title

Near-field photolithographic method for making two dimensional photonic bandgap structures

Author

Wei, Pei-Kuen ; Chang, Wei-Lun ; Chang, Yu-Jen

fYear

2005

fDate

38544

Firstpage

1157

Lastpage

1159

Keywords

Electron beams; Interference; Lattices; Lithography; Nanostructures; Optical beams; Optical diffraction; Photonic band gap; Throughput; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Quantum Electronics Conference, 2005. International

Print_ISBN

0-7803-9240-X

Type

conf

DOI

10.1109/IQEC.2005.1561045

Filename

1561045