Title :
The Effect of Humidity and Environment Temperature on Thin Film Pt/SnO2:Sb Gas Sensors
Author :
Anisimov, O.V. ; Maksimova, N.K. ; Chernikov, E.V. ; Sevastyanov, E.Y. ; Sergeychenko, N.V.
Author_Institution :
Siberian Phys. Tech. Inst., Tomsk
Abstract :
The effect of humidity on tin oxide thin film gas sensors has been studied in the case of methane. We found that the sensor resistance and response to methane are dramatically increased at decreasing of humidity. The results are qualitatively explained under the assumption that water molecules dissociate on the SnO2 surface, produce hydroxyl species capable of acting as electron donors and decrease the densities of chemisorbed atomic oxygen and lattice oxygen atoms.
Keywords :
antimony; chemisorption; dissociation; gas sensors; humidity; platinum; semiconductor thin films; thin film sensors; tin compounds; water; O; Pt-SnO2:Sb; SnO2; chemisorbed atomic oxygen; electron donors; environment temperature effect; humidity effect; hydroxyl species; lattice oxygen atoms; methane; thin film gas sensors; water molecule dissociation; Chemical sensors; Communication system control; Gas detectors; Humidity; Lattices; Plasma temperature; Sputtering; Temperature sensors; Thin film sensors; Tin; SnO2 sensor; humidity effect; thin films;
Conference_Titel :
Control and Communications, 2007. SIBCON '07. Siberian Conference on
Conference_Location :
Tomsk
Print_ISBN :
1-4244-0346-4
DOI :
10.1109/SIBCON.2007.371325
