Title :
Investigation of pseudo-Lateral-Field-Excitation in (yxl)-16.5° LiTaO3
Author :
Wenyan Wang ; Zhang, Zhitian ; Zhitian Zhang ; Liu, Yan ; Feng, Guanping ; Wang, Wenyan
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
Abstract :
In the present study, the LFE (lateral field excitation) coupling coefficient and phase velocity for (yxl)-16.5deg LiTaO3 were calculated as a function of the angle psi, which indicates the direction of the driving electric field with respect to the crystallographic x-axis of the piezoelectric plate. Several LFE devices of 5 MHz were designed and fabricated in two groups: psi = 0deg and psi = plusmn90deg. The result shows that for the LFE device of psi = 0deg operating in water, the thickness shear mode (TSM) could be excited both by LFE and TFE (thickness field excitation). For psi = plusmn90deg, the TSM is launched only by TFE and the device is in fact a pseudo-LFE device. Similar investigation has also been done to AT-cut quartz. The result suggests that the reported LFE AT-cut acoustic wave sensors may well be possible a pseudo-LFE device or a combination of TFE and LFE.
Keywords :
acoustic transducers; bulk acoustic wave devices; lithium compounds; piezoelectric transducers; quartz; AT-cut quartz; LiTaO3; SiO2; acoustic wave sensors; bulk acoustic wave devices; coupling coefficient; frequency 5 MHz; lateral field excitation device fabrication; phase velocity; piezoelectric plate; pseudoLFE device; pseudolateral-field-excitation; thickness field excitation; thickness shear mode; Acoustic sensors; Acoustic waves; Biosensors; Chaos; Crystallography; Electrodes; Piezoelectric devices; Resonance; Resonant frequency; Surface acoustic wave devices;
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2008.4622975