DocumentCode
2816102
Title
Determination of the crystalline quality of the piezoelectric materials of class 32 using X-Ray topography
Author
Capelle, B. ; Détaint, J. ; Epelboin, Y.
Author_Institution
IMPMC, Univ. Paris VI, Paris
fYear
2008
fDate
19-21 May 2008
Firstpage
219
Lastpage
224
Abstract
This paper reviews the crystalline quality attained to day by the most important materials of the crystalline class of quartz. Quartz, it-self, can present now a very reduced density of extended defects, however further advances are still possible concerning the impurity content. Aluminum and gallium phosphate crystals were prepared with a low density of extended defects and some times with very low impurity concentrations; however the OH concentration was more rarely very low. Langasite and its analogues can present a quite good crystalline quality but quite often too much defects are still present in the crystals. The interest presented by all the presently known piezoelectric crystals of class 32 for many high-end applications is such that further studies should be made to improve still more their quality.
Keywords
III-V semiconductors; X-ray topography; aluminium compounds; extended defects; gallium compounds; impurities; piezoelectric materials; point defects; quartz; AlP; GaP; SiO2; X-ray topography; aluminum phosphate crystals; class 32 piezoelectric materials; crystalline quality determination; extended defect density; gallium phosphate crystals; impurity concentrations; piezoelectric crystals; quartz; Aluminum; Crystalline materials; Crystallization; Crystals; Ferroelectric materials; Impurities; Lattices; Piezoelectric devices; Piezoelectric materials; Surfaces;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4622993
Filename
4622993
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