The long term reliability of a switched-capacitor relative humidity sensor system

Author

Denton, Denice D. ; Jaafar, Maha A S ; Ralston, Andrew R K ; Ho, Choon Ngiap ; He, S.-G.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

1990

fDate

12-14 Aug 1990

Firstpage

854

Abstract

A switched-capacitor driving circuit for a solid-state relative humidity sensor has been demonstrated. This CMOS circuit has been characterized using a discrete implementation. The circuit has been layed out and simulated for integration on a single chip. In addition, the long-term reliability of the solid-state sensing device has been investigated. The capacitance-RH characteristics exhibits a drift of +5% after eight weeks of aging at 85°C/85% RH. The linearity of the device decreases after 15 weeks of aging. The device drift is the greatest at low frequencies (12 Hz). The stability is best at higher frequencies. An operating frequency of 100 kHz for best device reliability is recommended

Keywords

CMOS integrated circuits; ageing; electric sensing devices; humidity measurement; reliability; stability; switched capacitor networks; 100 kHz; 15 wks; CMOS circuit; aging; capacitance change; capacitance-RH characteristics; drift; hysteresis; linearity; long term reliability; operating frequency; operation; relative humidity sensor system; single chip; solid-state sensing device; stability; switched-capacitor driving circuit; Aging; Capacitance-voltage characteristics; Circuit simulation; Frequency; Humidity; Integrated circuit reliability; Linearity; Sensor phenomena and characterization; Solid state circuits; Switching circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 1990., Proceedings of the 33rd Midwest Symposium on

Conference_Location

Calgary, Alta.

Print_ISBN

0-7803-0081-5

Type

conf

DOI

10.1109/MWSCAS.1990.140855

Filename

140855