Environmental value (EnV) analysis

In the life cycle of a semiconductor, from material extraction to electronics disposal, the processing of the wafers creates a significant environmental impact, and this impact is a major concern for semiconductor manufacturers. However, many of the impacts can be most effectively addressed by the equipment suppliers who design the manufacturing processes. The environmental value (EnV) analysis model is presented as a design tool which evaluates environmental cost of ownership, impact, and process quality to obtain effective total solutions for minimizing the impacts of semiconductor manufacturing. A case study evaluating 2 chamber cleaning processes for plasma enhanced chemical vapor deposition (PECVD) demonstrates implementation of the model