DocumentCode
2816696
Title
A PN-based scheduler for a flexible semiconductor manufacturing system
Author
Cavalieri, S. ; Mirabella, 0.
Author_Institution
Istituto di Inf. e Telecommun., Catania Univ., Italy
Volume
2
fYear
1996
fDate
18-21 Nov 1996
Firstpage
724
Abstract
The paper describes an approach to scheduling in a flexible semiconductor manufacturing system. The approach uses off-line scheduling as a basis for managing activities but integrates it with online scheduling whenever a modification in operating conditions requires a change in the scheduling previously drawn up. Petri nets (PNs) have been used as formal tool, for modelling and solving the scheduling problem
Keywords
Petri nets; flexible manufacturing systems; integrated circuit manufacture; production control; semiconductor device manufacture; FMS; PN-based scheduler; Petri nets; flexible semiconductor manufacturing system; online scheduling; Flexible manufacturing systems; Job shop scheduling; Manufacturing systems; Petri nets; Productivity; Robot kinematics; Scheduling algorithm; Semiconductor device doping; Semiconductor device manufacture; Telecommunications;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-3685-2
Type
conf
DOI
10.1109/ETFA.1996.573994
Filename
573994
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