Title :
A PN-based scheduler for a flexible semiconductor manufacturing system
Author :
Cavalieri, S. ; Mirabella, 0.
Author_Institution :
Istituto di Inf. e Telecommun., Catania Univ., Italy
Abstract :
The paper describes an approach to scheduling in a flexible semiconductor manufacturing system. The approach uses off-line scheduling as a basis for managing activities but integrates it with online scheduling whenever a modification in operating conditions requires a change in the scheduling previously drawn up. Petri nets (PNs) have been used as formal tool, for modelling and solving the scheduling problem
Keywords :
Petri nets; flexible manufacturing systems; integrated circuit manufacture; production control; semiconductor device manufacture; FMS; PN-based scheduler; Petri nets; flexible semiconductor manufacturing system; online scheduling; Flexible manufacturing systems; Job shop scheduling; Manufacturing systems; Petri nets; Productivity; Robot kinematics; Scheduling algorithm; Semiconductor device doping; Semiconductor device manufacture; Telecommunications;
Conference_Titel :
Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-3685-2
DOI :
10.1109/ETFA.1996.573994
