• DocumentCode
    2816831
  • Title

    Backside observation of semiconductor devices using a laser THz emission microscope

  • Author

    Yamashita, Masatsugu ; Nikawa, Kiyoshi ; Tonouchi, Masayoshi ; Otani, Chiko ; Kawase, Kodo

  • fYear
    2005
  • fDate
    38544
  • Firstpage
    1664
  • Lastpage
    1665
  • Keywords
    Electron microscopy; Failure analysis; Integrated circuit interconnections; Large scale integration; Laser excitation; MOSFET circuits; Optical pulses; Pump lasers; Semiconductor devices; Semiconductor lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics Conference, 2005. International
  • Print_ISBN
    0-7803-9240-X
  • Type

    conf

  • DOI
    10.1109/IQEC.2005.1561149
  • Filename
    1561149
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2816831