DocumentCode
2817045
Title
Micromechatronics
Author
Kuribayashi, Katsutoshi
Author_Institution
Dept. of Mech. Eng., Yamaguchi Univ., Ube, Japan
Volume
2
fYear
1996
fDate
18-21 Nov 1996
Firstpage
745
Abstract
Recent progress in micromechatronics is outlined. Micropumps, microvalves, micromobile robots, sensors for micromobile robots, microendoscopes and catheters, and micromanipulators and grippers are described
Keywords
biomedical equipment; mechatronics; micromechanical devices; robots; catheters; grippers; microendoscopes; micromanipulators; micromechatronics; micromobile robots; micropumps; microvalves; Actuators; Etching; Fluid flow; Magnetic liquids; Micromachining; Micropumps; Microvalves; Pumps; Silicon; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Technologies and Factory Automation, 1996. EFTA '96. Proceedings., 1996 IEEE Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-3685-2
Type
conf
DOI
10.1109/ETFA.1996.573997
Filename
573997
Link To Document