DocumentCode
2817234
Title
Ammonia sensing characteristics of quartz resonator coated with ZnO nanowires sensitive layer
Author
Cheng, Hongbin ; Qin, Lifeng ; Li, Fang ; Wang, Qing-Ming
Author_Institution
Dept. of Mech. Eng. & Mater. Sci., Univ. of Pittsburgh, Pittsburgh, PA
fYear
2008
fDate
19-21 May 2008
Firstpage
535
Lastpage
537
Abstract
In this paper, we present our recent study on the fabrication and characterization of ammonia gas sensors based on quartz thickness shear mode (TSM) resonators employing ZnO nanowires as the sensitive coating layer. c-axis vertically aligned ZnO nanowire arrays were synthesized on the quartz resonator through a simple hydrothermal synthesis route. The ZnO nanowires were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The sensing characteristics, including sensitivity, stability, reproducibility, and response time of the acoustic wave gas sensors have been studied under different concentration levels of ammonia at room temperature. It is demonstrated that the use of the ZnO nanowire arrays on quartz TSM acoustic wave resonator can greatly enhance the sensitivity and sensor response speed due to the fast surface/interface reaction and large surface/volume ratio of the nanowire arrays.
Keywords
II-VI semiconductors; X-ray diffraction; ammonia; gas sensors; nanotechnology; nanowires; scanning electron microscopy; surface acoustic wave resonators; wide band gap semiconductors; zinc compounds; NH3; SEM; X-ray diffraction; XRD; ZnO; acoustic wave resonator; ammonia sensing characteristics; fabrication process; gas sensors; hydrothermal synthesis; quartz thickness shear mode resonator; scanning electron microscopy; sensitive coating layer; surface-interface reaction; surface-volume ratio; temperature 293 K to 298 K; vertically aligned nanowires sensitive layer; Acoustic arrays; Acoustic waves; Coatings; Fabrication; Gas detectors; Nanowires; Scanning electron microscopy; Sensor arrays; Surface acoustic waves; Zinc oxide; Gas sensor; Quartz resonator; Thickness shear mode; ZnO nanowir arrays;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4623056
Filename
4623056
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