Title :
NEM relays using 2-dimensional nanomaterials for low energy contacts
Author :
Seunghyun Lee ; Tang, Anthony ; McVittie, James P. ; Wong, H.-S Philip
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
Nanoelectronics based on 2-dimensional layered materials is a field of rapidly growing interest. In particular, graphene and transition metal dichalcogenides (TMD) exhibit remarkable properties that can be exploited for many applications. Most electronic devices based on 2D materials, however, focus on the electronic properties of the material: 2D materials are usually utilized as semiconducting pathways for carriers (e.g. channels in transistors) or as conductors (e.g. interconnects, transparent conductor). In this work, we investigate the use of 2D materials as interfacial layers to improve the contacts of Nano-Electro-Mechanical(NEM) switches exploiting its surface and mechanical properties. In this study, the 2D layers will be used as the electrical contacts for the moving mechanical relays.
Keywords :
nanoelectromechanical devices; nanostructured materials; relays; switches; 2-dimensional layered materials; 2-dimensional nanomaterials; NEM relays; electrical contacts; low energy contacts; mechanical properties; moving mechanical relays; nano-electro-mechanical switches; nanoelectronics; surface properties; Films; Graphene; Metals; Relays; Substrates; Thermal stability;
Conference_Titel :
Energy Efficient Electronic Systems (E3S), 2013 Third Berkeley Symposium on
Conference_Location :
Berkeley, CA
DOI :
10.1109/E3S.2013.6705883