DocumentCode
2817435
Title
Resonator using Guided waves in a piezoelectric layer above a Bragg mirror
Author
Kone, I. ; Dubus, Bertrand ; Buchaillot, Lionel ; Reinhardt, Alexandre ; Casset, Fabrice ; Aïd, Marc ; Carpentier, Jean François ; Ancey, Pascal
Author_Institution
Dept. ISEN, IEMN, Lille
fYear
2008
fDate
19-21 May 2008
Firstpage
581
Lastpage
585
Abstract
This paper describes the design of resonators using waves guided in a piezoelectric layer located above a Bragg mirror. Such a resonator is suitable for the intermediate frequency (IF) and high frequency (HF) ranges. In the IF (about 600 MHz) band, maximum quality factor is achieved when exploiting the second guided mode (analogous to the S0 Lamb wave). In the HF band (about 2 GHz), a higher order mode (similar to the S1 Lamb wave) provides high coupling factors.
Keywords
mirrors; piezoelectric devices; surface acoustic wave resonators; surface acoustic wave waveguides; Bragg mirror; Lamb wave; guided waves; intermediate frequency; piezoelectric layer; resonators design; Acoustic propagation; Acoustic waves; Biomembranes; Film bulk acoustic resonators; Hafnium; Mirrors; Q factor; Radio frequency; Substrates; Surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4623066
Filename
4623066
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