Title :
Resonator using Guided waves in a piezoelectric layer above a Bragg mirror
Author :
Kone, I. ; Dubus, Bertrand ; Buchaillot, Lionel ; Reinhardt, Alexandre ; Casset, Fabrice ; Aïd, Marc ; Carpentier, Jean François ; Ancey, Pascal
Author_Institution :
Dept. ISEN, IEMN, Lille
Abstract :
This paper describes the design of resonators using waves guided in a piezoelectric layer located above a Bragg mirror. Such a resonator is suitable for the intermediate frequency (IF) and high frequency (HF) ranges. In the IF (about 600 MHz) band, maximum quality factor is achieved when exploiting the second guided mode (analogous to the S0 Lamb wave). In the HF band (about 2 GHz), a higher order mode (similar to the S1 Lamb wave) provides high coupling factors.
Keywords :
mirrors; piezoelectric devices; surface acoustic wave resonators; surface acoustic wave waveguides; Bragg mirror; Lamb wave; guided waves; intermediate frequency; piezoelectric layer; resonators design; Acoustic propagation; Acoustic waves; Biomembranes; Film bulk acoustic resonators; Hafnium; Mirrors; Q factor; Radio frequency; Substrates; Surface acoustic wave devices;
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2008.4623066
