DocumentCode
2818129
Title
Frequency sources and filters applications using high overtone bulk acoustic resonators exhibiting high Q.f product
Author
Gachon, Dorian ; Masson, Jeremy ; Courjon, Èmilie ; Gruson, Yannick ; Ballandras, Sylvain
Author_Institution
Dept. Time&Freq., FEMTO-ST Inst., Besancon
fYear
2008
fDate
19-21 May 2008
Firstpage
783
Lastpage
788
Abstract
Bulk acoustic waves excited in thin piezoelectric films have revealed their capabilities for addressing the problem of high frequency RF filters and frequency sources (above 1 GHz). In this paper, we propose an alternative to thin film deposition consisting in single crystal wafers bonded on substrate (high quality) and thinned down, allowing for plate thickness close to 30 mum. This has been achieved on 3 inches wafers and allows for an accurate selection of the wave characteristics.
Keywords
Q-factor; acoustic resonator filters; bulk acoustic wave devices; piezoelectric thin films; radiofrequency filters; wafer bonding; Q-f product; frequency RF filter; frequency source; high overtone bulk acoustic resonator; single crystal wafer bond; thin piezoelectric film; Acoustic applications; Electrodes; Frequency; Gold; Lithium niobate; Piezoelectric films; Resonator filters; Sputtering; Substrates; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4623106
Filename
4623106
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