• DocumentCode
    2818179
  • Title

    High power 1.48 μm DC-PBH LDs fabricated by all selective MOVPE (ASM) technology

  • Author

    Hosoda, T. ; Sasaki, Y. ; Sakata, Y. ; Komatsu, K. ; Hasumi, H.

  • Author_Institution
    ULSI Device Dev. Lab., NEC Corp., Shiga, Japan
  • fYear
    1998
  • fDate
    11-15 May 1998
  • Firstpage
    280
  • Lastpage
    283
  • Abstract
    The all selective metalorganic vapor-phase epitaxy (ASM) technique was adapted to 1.48 μm wavelength EDFA pumping lasers, for the first time. In this technique, not only double-heterostructure mesa stripe but also current blocking layers are grown by selective metalorganic vapor-phase epitaxy (MOVPE) with no semiconductor etching and no melt-back phenomenon, which results in precise dimension control. The fabricated device successfully demonstrated excellent light output power characteristics uniformity, such as 262 mW average output power at 1A with a standard deviation of only 1.4 mW for twenty laser chips
  • Keywords
    III-V semiconductors; MOCVD; gallium arsenide; gallium compounds; indium compounds; optical fibre amplifiers; semiconductor epitaxial layers; semiconductor lasers; vapour phase epitaxial growth; 1 A; 1.48 mum; 262 mW; DC-PBH laser diodes; EDFA pumping lasers; InGaAsP; all selective MOVPE; current blocking layers; dimension control; double-heterostructure mesa stripe; output power; DH-HEMTs; Epitaxial growth; Epitaxial layers; Erbium-doped fiber amplifier; Etching; Fabrication; Power amplifiers; Power generation; Pump lasers; Quantum well devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials, 1998 International Conference on
  • Conference_Location
    Tsukuba
  • ISSN
    1092-8669
  • Print_ISBN
    0-7803-4220-8
  • Type

    conf

  • DOI
    10.1109/ICIPRM.1998.712457
  • Filename
    712457