DocumentCode
2818179
Title
High power 1.48 μm DC-PBH LDs fabricated by all selective MOVPE (ASM) technology
Author
Hosoda, T. ; Sasaki, Y. ; Sakata, Y. ; Komatsu, K. ; Hasumi, H.
Author_Institution
ULSI Device Dev. Lab., NEC Corp., Shiga, Japan
fYear
1998
fDate
11-15 May 1998
Firstpage
280
Lastpage
283
Abstract
The all selective metalorganic vapor-phase epitaxy (ASM) technique was adapted to 1.48 μm wavelength EDFA pumping lasers, for the first time. In this technique, not only double-heterostructure mesa stripe but also current blocking layers are grown by selective metalorganic vapor-phase epitaxy (MOVPE) with no semiconductor etching and no melt-back phenomenon, which results in precise dimension control. The fabricated device successfully demonstrated excellent light output power characteristics uniformity, such as 262 mW average output power at 1A with a standard deviation of only 1.4 mW for twenty laser chips
Keywords
III-V semiconductors; MOCVD; gallium arsenide; gallium compounds; indium compounds; optical fibre amplifiers; semiconductor epitaxial layers; semiconductor lasers; vapour phase epitaxial growth; 1 A; 1.48 mum; 262 mW; DC-PBH laser diodes; EDFA pumping lasers; InGaAsP; all selective MOVPE; current blocking layers; dimension control; double-heterostructure mesa stripe; output power; DH-HEMTs; Epitaxial growth; Epitaxial layers; Erbium-doped fiber amplifier; Etching; Fabrication; Power amplifiers; Power generation; Pump lasers; Quantum well devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1998 International Conference on
Conference_Location
Tsukuba
ISSN
1092-8669
Print_ISBN
0-7803-4220-8
Type
conf
DOI
10.1109/ICIPRM.1998.712457
Filename
712457
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