Title :
Electro-thermal Simulations of Nanoscale Transistors with Optical and Acoustic Phonon Heat Conduction
Author :
Chun, Jung-Hoon ; Kim, Bokyung ; Liu, Yang ; Tornblad, Olof ; Dutton, Robert W.
Author_Institution :
Center for Integrated Systems, Stanford University, CA 94305. E-mail: jhchun@gloworm.stanford.edu
Abstract :
In order to take into account the nanoscale heat generation and phonon heat conduction, the optical and acoustic phonon temperature system for TCAD simulation is developed and self-consistently coupled with the hydrodynamic transport model. This electrothermal model is validated through the simulations of a thin-body SOI NMOSFET.
Keywords :
Acoustic scattering; Electron optics; Energy exchange; Hydrodynamics; Lattices; Optical films; Optical scattering; Phonons; Temperature; Thermal conductivity;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2005. SISPAD 2005. International Conference on
Print_ISBN :
4-9902762-0-5
DOI :
10.1109/SISPAD.2005.201526
