A robust two-time-scale control design for a pneumatic vibration isolator

Active pneumatic vibration isolators have been widely studied as the use of precision equipment increases. This paper focuses on the robust two-time-scale control design of an active pneumatic vibration isolator using the singular perturbation method and time delay control (TDC). The singular perturbation method, or more generally, the two-time-scale approach to feedback design is used to cope with the ill-conditioning of the pneumatic vibration isolator; TDC is used to overcome inevitable modeling errors in more accurate physical model of pneumatic vibration isolator and unknown disturbance such as base excitation. Because the proposed controller in this paper is based on more accurate physical model than rough model, accurate control is feasible. Numerical experiment demonstrates the effectiveness of the proposed robust two-time-scale control design.