DocumentCode
2821176
Title
ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)
fYear
1999
fDate
15-18 March 1999
Abstract
The following topics were dealt with: process characterization; RF characterization; sheet resistance measurements; oxide characterization; parameter extraction; power devices; device modelling
Keywords
characteristics measurement; electric resistance measurement; insulating thin films; integrated circuit measurement; integrated circuit modelling; integrated circuit testing; power integrated circuits; power semiconductor devices; semiconductor device models; RF characterization; device modelling; oxide characterization; parameter extraction; power devices; process characterization; sheet resistance measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Conference_Location
Goteborg, Sweden
Print_ISBN
0-7803-5270-X
Type
conf
DOI
10.1109/ICMTS.1999.766205
Filename
766205
Link To Document