Title :
Simple technique for the measurement of thermal time constants of microbolometer structures
Author :
Lambkin, Paul ; Folan, N. ; Lane, Bill
Author_Institution :
Nat. Microelectron. Res. Centre, Cork, Ireland
Abstract :
A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant
Keywords :
bolometers; infrared detectors; micromachining; microsensors; semiconductor device measurement; thermal analysis; thermal variables measurement; LCR meter; electrical technique; impedance measurement; maximum phase difference frequency; microbolometer structures; phase lag/lead; thermal time constant measurement technique; thermal time constants; Bolometers; Frequency; Optical arrays; Optical losses; Optical sensors; Resistors; Temperature; Thermal conductivity; Thermal resistance; Time measurement;
Conference_Titel :
Microelectronic Test Structures, 1999. ICMTS 1999. Proceedings of the 1999 International Conference on
Conference_Location :
Goteborg
Print_ISBN :
0-7803-5270-X
DOI :
10.1109/ICMTS.1999.766239
