Title :
Mixed system and component level T-CAD for micro fabrication
Author :
Hansen, U. ; Germer, C. ; Büttgenbach, S. ; Franke, H.-J.
Author_Institution :
Inst. for Microtechnol., TU Braunschweig, Germany
Abstract :
In this paper two T-CAD systems are presented, one dealing with the design of micro devices on the system level and allowing checking of process sequences using rules comprising expert knowledge. The other one is a work-flow-based system for the layout of micro components fabricated by wet chemical etching of silicon, thus providing a component level view to the design process. It is shown how both systems are integrated providing the designer with concurrent access to system and component design.
Keywords :
elemental semiconductors; etching; micromechanical devices; silicon; technology CAD (electronics); Si; T-CAD systems; micro devices; micro fabrication; mixed system; silicon; wet chemical etching; Assembly; Chemical processes; Design engineering; Fabrication; Knowledge engineering; Micromechanical devices; Process design; Shape; Silicon; Wet etching;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1286999
