VHDL-AMS modelling, simulation and testing of electrostatic micromotors

A good agreement has been found between the proposed micromotor model simulation results and the collected experimental dat. A better understanding of friction modelling issues has also been achieved through iterative simulation. Developed VHDL-AMS blocks can be considered as an initial phase towards the creation of Intellectual property (IP) blocks for microsystems in general and electrostatic micromotors in particular, enabling MEMS disign reuse and exchange between different designer teams. These blocks can subsequently be used for high level simulation of different types of systems along with other electronic or mechanical blocks, all within the same standard framework provided by VHDL-AMS. Experimental data from the MUMPS fabricated wobble micromotors will be presented in a future along with their VDHL-AMS models.